Hexafluoroethane, 99%
: CFC-116, Perfluoroethane
: Hexafluoroethane is a fluorocarbon counterpart to the hydrocarbon ethane. It is a non-flammable gas negligibly soluble in water and slightly soluble in alcohol.
: Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
Properties
Safety Information
Hazard Codes : Xi
Safety Statements : 38
RIDADR : UN 2193 2.2
WGK Germany : 3
RTECS : KI4110000
| Packings | Price (INR) |
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250 gm
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POR
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1 kg
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POR
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