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Product Details

Hexafluoroethane, 99%

Synonyms

CFC-116, Perfluoroethane

Code

H 0813

Grade

puriss

Mol. Formula

CF₃CF₃.

GST Tax Rate

18%

CAS

76-16-4

Purity

99%

Mol. Weight

138.01.

Packing

Bottle / Drum

Applications

Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.

Description

Hexafluoroethane is a fluorocarbon counterpart to the hydrocarbon ethane. It is a non-flammable gas negligibly soluble in water and slightly soluble in alcohol.

Properties

Safety Information

Description

Hazard Codes : Xi
Safety Statements : 38
RIDADR : UN 2193 2.2
WGK Germany : 3
RTECS : KI4110000

Packings	Price (INR)
250 gm	POR
1 kg	POR

DisclaimerThe above particulars do not release the customer from the obligation to carry out an inspection of goods received.
For laboratory use only. Not for drug, medical, household, or any other unauthorized application.
We assume no liability for misuse or unauthorized application of the product. Please test before use.